The physical properities of cantilever, in particular the spring constant has important influence on the microcomponent of MEMS.
摘要悬臂梁的物理性能参数尤其弹性系数对MEMS中微器件的性能有要的影响。
MEMS will be one of the most important realm of science in 21th century,and micropower which is a branch of MEMS directly relates to development of MEMS in some applied realm.
微机电系统(MEMS)将21世纪最要的研究领域,微能源器件MEMS其中个要分支,其发展直接关系到MEMS在某些领域中的应用。
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